Basically, US DoE invented the core tech and formed a consortium called EUV LLC to further develop the technology. ASML came along much later to acquire SVG in order to gain commercial access to the technology and research. The Dutch company "ASML" didn't actually invent most of it. They are just the integrator.
This is how ASML even describes itself:
> Board member Wayne Allan in 2023:
“We're an integrator – we build some of the modules in our machines, but we procure a huge amount of materials and critical components from suppliers, nearly 80% of the components.”
Most of the valuable tech comes from American, German, and Japanese companies.
https://en.wikipedia.org/wiki/EUV_lithography
Basically, US DoE invented the core tech and formed a consortium called EUV LLC to further develop the technology. ASML came along much later to acquire SVG in order to gain commercial access to the technology and research. The Dutch company "ASML" didn't actually invent most of it. They are just the integrator.
This is how ASML even describes itself:
> Board member Wayne Allan in 2023: “We're an integrator – we build some of the modules in our machines, but we procure a huge amount of materials and critical components from suppliers, nearly 80% of the components.”
Most of the valuable tech comes from American, German, and Japanese companies.