Comment
Comment by Zeetah
A few things about MEMS devices I have not been able to figure out is:
1. Is the sensing/moving structure actually disconnected from the rest of the device?
2. If so, how does it not get stuck to a side?
3. If it isn't disconnected, doesn't the friction from the connection cause an offset in the reading?
4. How do they etch the structure so that it is disconnected from the layer below?