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Comment by Zeetah

A few things about MEMS devices I have not been able to figure out is: 1. Is the sensing/moving structure actually disconnected from the rest of the device? 2. If so, how does it not get stuck to a side? 3. If it isn't disconnected, doesn't the friction from the connection cause an offset in the reading? 4. How do they etch the structure so that it is disconnected from the layer below?
parent Zeetah 15 days ago

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