Comment Comment by chintech2 This is repeated again and again.There is no relation to DARPA at all.ASML licensed from the DOE, and this license is from 1997, almost 30 years ago. Then, in 2001, ASML bought a US silicon company that had the EUV patents. That was 25 years ago. Those patents expired already. parent chintech2 5 months ago
There is no relation to DARPA at all.
ASML licensed from the DOE, and this license is from 1997, almost 30 years ago. Then, in 2001, ASML bought a US silicon company that had the EUV patents. That was 25 years ago. Those patents expired already.