The EUV light is produced by shooting a pulsed laser on tin droplets.
You already lose most of the input power in the pulsed laser. Then only a fraction of the energy of the light hitting the tin is converted to EUV light with the correct wavelength.
Finally the EUV light has to be focused on the mask through complicated optics, which is notoriously difficult for EUV light.
I guess, there are other sources of inefficiencies, that I forgot.
You already lose most of the input power in the pulsed laser. Then only a fraction of the energy of the light hitting the tin is converted to EUV light with the correct wavelength. Finally the EUV light has to be focused on the mask through complicated optics, which is notoriously difficult for EUV light.
I guess, there are other sources of inefficiencies, that I forgot.