Comment by Szpadel

AFAIK the main coat of EUV is cost of machines that will be obsolete in few years, so you want to produce as many chips using them as possible during that timeframe, they design a lot of around to maintain near 100% uptime of those machines. This include buffers before and after machines (so any unplanned stalls are mitigated) and technicians trained to do maintenance in F1 pitstop fashion. (source: some tour of some chipmaker I saw online, no longer remember details)