I'm distantly remembering old video about someone shouting at hard disk rack. Those machines are probably acting like a giant microphones when just moving air around is enough to have a too big effect on position measurements.
[Engineer monitors a EUV machine]
[Distant farting sound, machine instantly flashes yellow light for a brief moment]
Carl [shouts back]: Bob, for fsck sake, told you to stop with the beans!
[Machine throws red light and discards current wafer].
[Engineer monitors a EUV machine]
[Distant farting sound, machine instantly flashes yellow light for a brief moment]
Carl [shouts back]: Bob, for fsck sake, told you to stop with the beans!
[Machine throws red light and discards current wafer].
Carl [whispers to himself]: Ah crap.