Article is paywalled so I can't read past the first 2 paragraphs, but I still don't understand what the controversy about this is. EUV was developed with significant input and resources from the US government [1], so I understand the rationale behind export controls there. But immersion lithography is quite different. My understanding is it was proposed in published papers as early as the 80s, but was industrialized by ASML in the late 90s. Please correct me if I'm wrong, but I don't think the US government was involved with immersion lithography in any way.
I'm sure the actual legal mechanisms are complicated, but I don't see any justification for the US imposing export controls on technology developed in-house by a European company.
I'm sure the actual legal mechanisms are complicated, but I don't see any justification for the US imposing export controls on technology developed in-house by a European company.
[1] https://www.spiedigitallibrary.org/ebooks/PM/EUV-Lithography...