Comment by rayiner

There are various limits in play: https://www.extremetech.com/computing/97469-is-14nm-the-end-.... At sub-nanometer we're talking about features of 5-10 atoms across. At that scale you get effects like electrons quantum tunneling between transistors: https://www.theverge.com/circuitbreaker/2016/10/6/13187820/o.... We probably won't get there with existing silicon technology.